Lam Research Corp. today said it plans to integrate metrology technology from Santa Clara, Calif.-based Sensys Instruments on board Lam’s Teres chemical mechanical planarization (CMP) tools. Lam ...
FREMONT, Calif.–Lam Research Corp. here said it is pushing forward with efforts to integrate metrology for new processes in chemical mechanical planarization (CMP) with a new tool option that combines ...
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