IEEE

Optofluidic Sensor for Iron Detection Based on Inline Fabry–Perot Interferometer Fabricated by Femtosecond Laser Pulses and Selective Etching

Abstract: In this work, an inline Fabry-Perot interferometer (FPI)-based optofluidic sensor is demonstrated for iron detection in aqueous solution. The fiber structure consists of two fluidic channels ...
IEEE

Wet Etching Process Optimization and Consistency Enhancement of Massive Through Glass Vias Through Laser-Induced Wet Etching

Abstract: Through glass via (TGV) technology presents a promising alternative for 3-D vertical interconnects in advanced packaging. As device integration progresses, the number of through vias in ...