Belarusian State University of Informatics and Radioelectronics, Brovki Str. 6, 220013 Minsk, Belarus, Universitat Rovira i Virgili, Av. Paisos Catalans 26, 43007 Tarragona, Spain, University of ...
Abstract: We present a new MEMS probe card, which is composed of silicon (Si) cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni film can yield a higher ...
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